JPH0447250U - - Google Patents

Info

Publication number
JPH0447250U
JPH0447250U JP9100190U JP9100190U JPH0447250U JP H0447250 U JPH0447250 U JP H0447250U JP 9100190 U JP9100190 U JP 9100190U JP 9100190 U JP9100190 U JP 9100190U JP H0447250 U JPH0447250 U JP H0447250U
Authority
JP
Japan
Prior art keywords
target
shower device
electron shower
generates
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9100190U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0754918Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9100190U priority Critical patent/JPH0754918Y2/ja
Publication of JPH0447250U publication Critical patent/JPH0447250U/ja
Application granted granted Critical
Publication of JPH0754918Y2 publication Critical patent/JPH0754918Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP9100190U 1990-08-29 1990-08-29 エレクトロンシャワー装置 Expired - Lifetime JPH0754918Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9100190U JPH0754918Y2 (ja) 1990-08-29 1990-08-29 エレクトロンシャワー装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9100190U JPH0754918Y2 (ja) 1990-08-29 1990-08-29 エレクトロンシャワー装置

Publications (2)

Publication Number Publication Date
JPH0447250U true JPH0447250U (en]) 1992-04-22
JPH0754918Y2 JPH0754918Y2 (ja) 1995-12-18

Family

ID=31826237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9100190U Expired - Lifetime JPH0754918Y2 (ja) 1990-08-29 1990-08-29 エレクトロンシャワー装置

Country Status (1)

Country Link
JP (1) JPH0754918Y2 (en])

Also Published As

Publication number Publication date
JPH0754918Y2 (ja) 1995-12-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term